High Aspect Ratio Tip (HART)(AFM 探针)

  • Different spike length options (1/2/4/6 µm)
  • Different tilt angle compensation (0/3/12°)



HART0-X(X=1/2/4/6 )

High aspect ratio probes with Xµm(X=1/2/4/6 µm) spike and no tilt (0/3/12°) compensation; Uncoated
 
Cantilever Specs.*
Material Silicon
Shape Rectangular
k (N/m) 40
f (kHz) 300
Tip Specs.*
Material Silicon
Shape Pyramidal
Height (µm) 14-16
ROC (nm) 20
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