Overview of KRC-SSRM-100
The CRM for the evaluation of scanning spreading resistance microscopy (SSRM) is a nanostructure with multiple certified activated doping layers. It can be used as a CRM to check the operation of SSRMs and evaluating the spatial resolution of SSRMs.
The KRC-SSRM-100 is a nanostructure standard with four doping layers sequentially arranged with an activated doping layer width of 5 - 40 nm, which is used for the evaluation of SSRM spatial resolution.
Main Specifications of KRC-SSRM-100
| Item | Detailed Specifications |
| Activated layer width | 5 nm, 10 nm, 15 nm, 20 nm, 40 nm |
| Pattern length | 4.0 mm (certified area: 3.0 mm from enter) |
| Roughness (Rq) | max 0.5 nm |
| Defectivity | max 2% (max 60 um within 3,000 μm certified area) |
| Traceability | Si lattice constant measured by TEM |
TEM Image and SSRM line profile
