Overview of KRC-NSC-100
Nano Step-height Calibrator (NSC) is a CRM to calibrate the step height of atomic force microscopes (AFM) by comparing the measured and certified step-height values.
A step-height correction factor (fc) can be determined from the ratio of the measured and certified step-height values of the CRM and the step-height of the target nanostructure can be accurately obtained from the step-height correction factor.
Specifications of KRC-NSC-100
| Item | Detailed Specifications |
| Pattern height | 100 nm |
| Pattern pitch | 3, 5, 10 μm |
| Specimen size | 5 mm x 5 mm |
| Pattern size | 1 mm x 1mm |
| Defectivity | max 1% |
| Traceability | Si lattice constant measured by TEM: ILAC-MRA, KOLAS |
