Overview of KRC-ATC-200
The AFM Tip Characterizer (ATC) is a nanostructure CRM with a number of certified trenches. It is used to check the properties of AFM tips such as radius and cone angle before the AFM measurement. The KRC-ATC-200 has 3 trenches with widths of between 50 - 200 nm and can be used to evaluate general AFM tips.
Specifications of KRC-ATC-200
| Item | Detailed Specifications |
| Trench width | 50 nm, 100 nm, 200 nm |
| Pattern width | 50 nm (not certified) |
| Trench Height | 100 nm (not certified) |
| Pattern length | 4.0 mm (certified area: 3.0 mm from center) |
| Roughness (Rq) | max 0.5 nm |
| Defectivity | max 2% (max 60 um within 3,000 μm certified area) |
| Traceability | Si lattice constant measured by TEM: ILAC-MRA, KOLASmax 2% (max 60 um within 3,000 μm certified area) |
SEM Image and AFM line profile
