Overview of KRC-HMC-100
The High Magnification Calibrator (HMC) is a CRM to calibrate the magnification of atomic force microscopes (AFM) and scanning electron microscopes (SEM) by comparing the measured and certified pitch values.
KRC-HMC-100 is also used to calibrate the offset values in AFM and SEM measurements by comparing the measured and certified width values.
Specifications of KRC-HMC-100
|
Item |
Detail specifications |
|
Pattern width |
5 certified widths of 20 nm ~ 80 nm |
|
Pattern width |
5 certified pitchs of 100 nm ~ 900 nm |
|
Pattern width |
70 nm (not certified) |
|
Pattern width |
4.0 mm (certified area: 3.0 mm from center) |
|
Roughness |
max 0.5 nm |
|
Defectivity |
max 1% (max 30 um within 3,000 μ certified area) |
|
Traceability |
Si lattice constant measured by TEM: ILAC-MRA, KOLAS |
